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Invoil® 20 Pump Oil

Invoil 20 Pump Oil
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Price: 124.56
Product ID : INV201
INV205 Size=5 Gallon Bottle Inland 20 Pump Oil INV20L Size=1 Liter Bottle Inland 20 Pump Oil INV201 Size=1 Gallon Bottle Inland 20 Pump Oil INV2012 Size=12 X 1 Liter case Inland 20 Pump Oil


Invoil 20 pump oil will provide superior results in vacuum pumps. This pump oil has dual applications, i.e. it can be used as a high grade rough pump oil but it also has applications as a low grade diffusion pump oil. This oil is recommended as a rough pump oil on mass spectrometers, SEM, and other vacuum systems where the ultimate in vacuum is desired. Invoil 20 will provide a decade improvement in pumping efficiency over Inland 19 when used in rough pumps. This oil can be used as diffusion pump oil on low grade vacuum systems but is not recommended for diffusion pumps on mass spectrometers and other equipment requiring high efficiency from the diffusion pumps.

Invoil 20 is the standard mechanical pump fluid used in applications involving corrosive or reactive gases. Typical applications include LPCVD, plasma etch and high resolution mass spectrometers. When compared to Inland 19, Invoil 20 will last three to five times longer.


  • Double Distilled
  • High Resistance to Corrosive Attack
  • Reduced Backstreaming
  • Extended Fluid Life
  • For Use In Corrosive
  • For Ultimate Vacuum of Rough Pumps
  • Vapor Pressure 3 x 10-6
  • Used In High Resolution Mass Spec Rough Pumps


Vapor Pressure @ 25 °C: 3 x 10-6 torr
Boiling Point @.01 torr: 127 degrees C (261 °F)
Viscosity @ 40 °C: 58 cst (269 SUS)
Viscosity @ 100 °C: 8.5 cst (54.1 SUS)
Pour Point: -10 °C (14 °F)
Flash Point: 224 °C (435 °F)
Fire Point: 259 °C (498 °F)
Density: 0.86 gm/cc


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