EXT75DX Turbomolecular Pump by Edwards

Edwards Turbo Pump EXT75DX
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Price: 5720
Product ID : B72241000


The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.


  • Compatible with TIC turbo and instrument controller
  • Multiple communication modes available including parallel mode, which allows traditional control signal interface and serial mode, which allows RS232 interface
  • Numerous user configurable parameters via RS232 interface including vent valve control settings, normal speed indication, stand-by running speed, programmable power settings, power consumption and pump temperature.
  • Enhanced monitoring capability including pump speed, power and temperature.


Technical Data
Inlet flange DN63ISO-K, DN63CF, DN40NW or DN100ISO-K
Outlet flange DN16NW
Vent/purge port 1/8 inch BSP
Pumping Speed ISO63/63CF (DN40NW)(ISO100)

61 ls-1 (42 ls-1) (66 ls-1)
57 ls-1 (49 ls-1) (59 ls-1)
53 ls-1 (48 ls-1) (54 ls-1)
Compression ratio:

1 × 1011
1 x 106
5 x 104
Recommended backing pump* RV5/nXDS6i
Max continuous inlet pressure (light gas pumping)†
  • water cooling (water at 15 °C, ambient temp at 40 °C) 2 × 10-2 mbar
  • forced air cooled, 35 °C ambient 1 × 10-2 mbar
  • 2 × 10-2 mbar
  • 1 × 10-2 mbar
Pump rotational speed
Nominal rotational speed 90000 rpm
Standby rotational speed Variable from 49500 to 90000 rpm
(63000 rpm default)
Programmable power limit settings Variable from 50-120W (80W default)
Analogue outputs Rotational speed; Power consumption; Pump temp; Controller temp
Start time to 90% speed 110 s ‡
Ultimate Pressure (ISO/CF)
RV backing pump
Diaphragm backing pump

<5 x 10-9 / 5 x 10-10
<5 x 10-8 / 5 x 10-9
Cooling method# Forced air / water
Ambient air temperature for forced air cooling 5 - 35 °C
Min cooling water flow rate (water 15 °C) 15 l h-1
Water temp range 10 - 20 °C
Max inlet flange temp 100 °C
Operating attitude Vertical and upright, through to Horizontal
Noise level at 1 metre <50 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC100
Quiescent electrical power 10 W

* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately


A - Manual vent valve in vent port
B - Podule
C - Logic interface connector
D - Backing port
E - Purge port (blanked off)
F - Interstage port (EXT75iDX only)
G - Podule connector socket
H - Earth connection