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STABIL-ION® VACUUM MEASUREMENT SYSTEM

Catalog F32
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STABIL-ION Vacuum Measurement System
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A: guard
B: tensioned filaments
C: rugged stainless steel enclosure
D: port shield
E: partial caps on anode
F: precision wound stress-relieved anode
G: feedthrough insulator shield
H: self-aligning lock-on connector

Description

  • Highest Long-Term Accuracy Vacuum Gauge from Granville Phillips
  • Improved Long-Term Accuracy

Long-term accuracy of pressure measurement is essential in vacuum processing to achieve maximum throughput. Conventional IG Systems will typically provide pressure indications that are uncertain by 30 to 40% at mid-range and by several hundred percent at higher pressures when new. Even accurate calibration does nothing to improve the accuracy of readout on non STABIL-ION Systems. With these older systems, you must use lookup tables to get accurate information and, with use, the calibration typically changes resulting in unavoidable errors. Only STABIL-ION Systems can automatically correct for the inherent nonlinearity in sensitivity in all Bayard-Alpert type gauges. Compare the 2, 3, or 6% uncertainty of readout at mid-range of STABIL-ION Systems (depending on the system ordered) with the approximately 10 times larger uncertainty of older systems and you will choose STABIL-ION Systems.

Why can only STABIL-ION Systems provide such accurate readout?

It is because only STABIL-ION Systems have a design that helps assure unequaled long-term stability of calibration. Obviously, it does no good to store calibration data in controller memory if it is going to change, so conventional systems have never stored calibration data. Only STABIL-ION Systems have sufficient stability to warrant storing calibration data in the controller, thus permitting accurate readout over the entire pressure range.

STABIL-ION Systems Offer Greatly Improved Convenience

All older hot cathode IG systems provide only a single value of sensitivity stored in the controller. This "one size fits all" results in large uncertainties of readout across the pressure range. Calibration can provide better accuracy, but inconvenient lookup tables are required with all older systems.

STABIL-ION Systems are the only systems to eliminate the need for lookup tables when accurate pressure data are required.

With gas specific Memory Modules, you can achieve accurate direct pressure readout for any compatible gas of your choosing (e.g., nitrogen or argon).

Reliability is Designed In

With STABIL-ION Gauges, there is no glass breakage, glass decomposition, or helium permeation. Conventional nude ionization gauges also have no glass envelopes; however, the lack of a fixed metal envelope and shields around the electrodes means that any change on the position or potential of any surface in the vicinity of the nude gauge affects its accuracy.

GPC uses a proprietary filament coating process with greatly improved adhesion and uniformity of coating for longer cathode life. A number of pre-production STABIL-ION Gauges have been operating continuously for over 42 months.

STABIL-ION filaments are burnout resistant even in air whereas tungsten filaments burn out instantly on exposure to air, even before they can be turned off.

A power limiter prevents excessive pressure during degas. There is automatic turn-off if the pressure gets too high, if the emission is insufficient, or if the anode potential is too low. A high voltage arc preventer rapidly interrupts degas if a discharge starts to form.


STABIL-ION Systems Help Avoid Process Replication Problems

A common complaint is that it is virtually impossible to transfer a nicely operating process to another system without extensive tweaking.

Patented STABIL-ION Systems are the first to provide reproducible pressure indications from system to system which are essential for successful process replication. Even if STABIL-ION or CONVECTRON Gauges are replaced, processing results are much more likely to remain the same.

STABIL-ION Gauges are Safer

A Metal enclosure eliminates the risk of glass breakage and the implosion hazard which is often present with glass ionization gauges. The all-metal enclosure extends beyond the electrical connections greatly reducing electrical shock hazards if your vacuum system is appropriately grounded. A guard helps protect you from being burned during degas and prevents cables and plastic utility lines from contacting hot surfaces.

STABIL-ION Systems are Listed by Underwriters Laboratories Inc. (UL). Samples of this product have been evaluated by UL and meet the applicable UL Standards for Safety. STABIL-ION Systems are the first in their product category to be listed by UL.

STABIL-ION Gauges have Burnout Resistant Filaments

Tungsten filaments burn out instantaneously when exposed to air while operating, as some vacuum users have discovered to their dismay. If a vacuum accident happens, a valve is opened at the wrong time, a serious air leak develops, etc., kiss your tungsten filaments good-bye.

The STABIL-ION Gauge utilizes thoria coated iridium filaments which are extremely resistant to burnout. These filaments have been operated for over an hour in air at atmospheric pressure, at normal filament heating power without burning out. GPC, of course, does not recommend this type of harsh treatment of an IG. We did it merely as a graphic illustration of just how burnout resistant our gauges are.

Specs

Controller - Cat. Nos. 360101, 360102
Pressure range for N2/air emission range emission range
  0.1 mA 2x10-2 to 4x10-9 Torr
3 to 5x10-7 Pa
  4.0 mA 5x10-4 to 1x10-10 Torr
7x10-2 to 1x10-8 Pa
Display resolution 3 digits
Display units Torr, mbar, or Pa
Display update rate 2/sec
Degas power electron bombardment, 40 W
Degas timer range 1 to 30 minutes, adjustable
Maximum ionization gauge cable length 60 m (200 ft)
   
Operating temperature 0-40 °C ambient, noncondensing
Input voltage 90 to 130 Vac, or 180 to 250 Vac
Input frequency 50 or 60 Hz
Input power 220 W maximum
Analog output 1-10 V, 1 V/decade, logarithmic
Accuracy at 25 °C ± 5 °C:  
Electrometer ± 1% of reading to 10 µA
  ± least significant digit ± 2 pA
   
Emission current ± 0.25% of setting
Anode and cathode bias ± 0.3% of nominal values
   
STABIL-ION Gauge - Cat. Nos. 360120
X-ray limit 2x10-10 torr maximum
Bakeout temperature, nonoperating 450 °C maximum
Operating temperature 0 - 50 °C ambient, noncondensing
STABIL-ION cable bakeout temperature 150 °C maximum
Materials exposed to vacuum vacuum fired, UHV compatible
Controller and Power Supply STABIL-ION Gauge with connector

Ordering Information

The STABIL-ION System from SIS includes the following components and parts.
1. STABIL-ION Controller (#360102) rack mounted controller with remote power supply.
2. STABIL-ION Gauge with CF flange mount (#360120)
3. 10 ft. STABIL-ION Cable (#360113)

The system is calibrated for output in Torr and wired for 120 VAC, 60Hz, USA type plug.

Part No. Description Stock/
Lead Time
Price
EA
Order
GP360102K STABIL-ION System, includes STABIL-ION Gauge DISCONTINUED------
360120 STABIL-ION Gauge 0Lead time for this non-stock item is approximately 21 days. $1282.43
Qty
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