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Differential pump system for use with VQM

Differential Pump System by Granville-Phillips®
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Description

The Differential Pump System by Granville-Phillips® extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.

Typical Usage

  • Monitoring gas reactions
  • Determining when to start a process
  • Detecting contaminants
  • Controlling the amount of reactive gas introduced
  • Leak detection

Features

  • Operation from 3 Torr to 5x10-9 Torr
  • 1-145 amu range or optionally 1-300 amu
  • Fast: 120 msec scan
  • Easy to setup including calibration
  • Quickly see gas composition and trend information
  • Includes turbo and roughing pumps
Part No. Description Quantity
In Stock
Price
EA
Order
835901DPS3M11   MISSING PART NUMBERCALL
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835500U11   MISSING PART NUMBERCALL
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83530003M CABLE VQM CONTROLLER-3 M 3 METER LENGTH CONTROLLER TO MASS SPECTROMETER GUAGE 0Standard lead-time for non-stock items is approximately two weeks depending on the item. $1090.00
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8335400 SOFTWARE DIFF VQM USE PART # 835400 0Standard lead-time for non-stock items is approximately two weeks depending on the item. $685.00
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80230103M VQM 3M CABLE USE WITH 835 VQM 0Standard lead-time for non-stock items is approximately two weeks depending on the item. $270.00
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8012111   MISSING PART NUMBERCALL
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8012112   MISSING PART NUMBERCALL
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8012114   MISSING PART NUMBERCALL
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8012115   MISSING PART NUMBERCALL
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801700MK   MISSING PART NUMBERCALL
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  • Vacuum Quality Monitor System (835 VQM™, Granville-Phillips®)Vacuum Quality Monitor System (835 VQM™, Granville-Phillips®)
    The world’s fastest, lowest power, gas compositional analysis autoresonant ion trap mass spectrometer (IT-MS) instrument with full data collection, spectral deconvolution, and data logging software. Compact size. 1–145 amu at 85 ms capture rates or 1-300 amu at 120 msec. UHV to 10-5 Torr, or 3 Torr with differential pump. Usually coupled with a total pressure gauge to provide partial pressures of each gas.