See also the following section of our catalog:
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Invoil® 20 Pump Oil
Invoil 20 pump oil will provide superior results in vacuum pumps. This pump oil has dual applications, i.e. it can be used as a high grade rough pump oil but it also has applications as a low grade diffusion pump oil. This oil is recommended as a rough pump oil on mass spectrometers, SEM, and other vacuum systems where the ultimate in vacuum is desired. Invoil 20 will provide a decade improvement in pumping efficiency over Inland 19 when used in rough pumps. This oil can be used as diffusion pump oil on low grade vacuum systems but is not recommended for diffusion pumps on mass spectrometers and other equipment requiring high efficiency from the diffusion pumps. Invoil 20 is the standard mechanical pump fluid used in applications involving corrosive or reactive gases. Typical applications include LPCVD, plasma etch and high resolution mass spectrometers. When compared to Inland 19, Invoil 20 will last three to five times longer.
Other Mechanical Pump Oils:
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